-
Microwave plasma source
-
Patent number 4,433,228
-
Issue date Feb 21, 1984
-
Hitachi, Ltd.
-
Shigeru Nishimatsu
-
H01 - BASIC ELECTRIC ELEMENTS
-
Electron beam scribing method
-
Patent number 4,363,953
-
Issue date Dec 14, 1982
-
Hitachi, Ltd.
-
Teiji Katsuta
-
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
-
Electron microscope
-
Patent number 4,189,641
-
Issue date Feb 19, 1980
-
Hitachi, Ltd.
-
Shinjiro Katagiri
-
H01 - BASIC ELECTRIC ELEMENTS
-
-
Electron microscope
-
Patent number 4,121,100
-
Issue date Oct 17, 1978
-
Hitachi, Ltd.
-
Morioki Kubozoe
-
H01 - BASIC ELECTRIC ELEMENTS