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Turbo vacuum pump
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Patent number 5,501,583
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Issue date Mar 26, 1996
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Hitachi, Ltd.
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Takashi Nagaoka
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Turbo vacuum pump
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Patent number 5,451,147
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Issue date Sep 19, 1995
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Hitachi, Ltd.
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Seiji Sakagami
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Turbo vacuum pump
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Patent number 5,380,171
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Issue date Jan 10, 1995
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Hitachi, Ltd.
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Takashi Nagaoka
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Evacuation system and method therefor
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Patent number 5,259,735
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Issue date Nov 9, 1993
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Hitachi, Ltd.
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Kazue Takahashi
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Turbomolecular vacuum pump
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Patent number 4,768,921
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Issue date Sep 6, 1988
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Hitachi, Ltd.
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Ueda Shinjiro
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Turbo molecular pump
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Patent number 4,735,550
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Issue date Apr 5, 1988
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Hitachi, Ltd.
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Takeshi Okawada
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Centrifugal fluid machine
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Patent number RE32462
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Issue date Jul 21, 1987
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Hitachi, Ltd.
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Yoichi Yoshinaga
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415 - Rotary kinetic fluid motors or pumps
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Turbomolecular pump
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Patent number 4,579,508
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Issue date Apr 1, 1986
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Hitachi, Ltd.
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Nobuo Tsumaki
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Blower
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Patent number 4,432,694
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Issue date Feb 21, 1984
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Hitachi, Ltd.
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Sigeaki Kuroda
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Diffuser of centrifugal fluid machine
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Patent number 4,421,457
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Issue date Dec 20, 1983
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Hitachi, Ltd.
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Yoichi Yoshinaga
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Centrifugal fluid machine
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Patent number 4,395,197
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Issue date Jul 26, 1983
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Hitachi, Ltd.
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Yoichi Yoshinaga
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Impeller of a centrifugal blower
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Patent number 4,231,706
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Issue date Nov 4, 1980
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Hitachi, Ltd.
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Shinjiro Ueda
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...