Shinjiroo Ueda

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Patents Grantslast 30 patents

Information Patent Grant
Method of and apparatus for producing superpure nitrogen
- Patent number 5,122,175
- Issue date Jun 16, 1992
- Hitachi, Ltd.
- Shozi Koyama
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Vacuum system with a secondary gas also connected to the roughing p...
- Patent number 5,062,771
- Issue date Nov 5, 1991
- Hitachi, Ltd.
- Akihiko Satou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Turbo vacuum pump
- Patent number 5,020,969
- Issue date Jun 4, 1991
- Hitachi, Ltd.
- Masahiro Mase
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Method for LPCVD of semiconductors using oil free vacuum pumps
- Patent number 4,835,114
- Issue date May 30, 1989
- Hitachi, Ltd.
- Akihiko Satou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Turbomolecular pump
- Patent number 4,732,530
- Issue date Mar 22, 1988
- Hitachi, Ltd.
- Shinjiroo Ueda
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...