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Shinobu MIYAZAKI
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Koshi City, JP
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Patents Grants
last 30 patents
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Patent Grant
Filter unit pretreatment method, treatment liquid supply apparatus,...
Patent number
10,974,181
Issue date
Apr 13, 2021
Tokyo Electron Limited
Yuichi Yoshida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Filter unit pretreatment method, treatment liquid supply apparatus,...
Patent number
10,493,387
Issue date
Dec 3, 2019
Tokyo Electron Limited
Yuichi Yoshida
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Bottle change apparatus, substrate treatment apparatus, bottle chan...
Patent number
10,000,331
Issue date
Jun 19, 2018
Tokyo Electron Limited
Arnaud Alain Jean Dauendorffer
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Patents Applications
last 30 patents
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Patent Application
FILTER UNIT PRETREATMENT METHOD, TREATMENT LIQUID SUPPLY APPARATUS,...
Publication number
20200016521
Publication date
Jan 16, 2020
TOKYO ELECTRON LIMITED
Yuichi YOSHIDA
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
FILTER UNIT PRETREATMENT METHOD, TREATMENT LIQUID SUPPLY APPARATUS,...
Publication number
20160236124
Publication date
Aug 18, 2016
TOKYO ELECTRON LIMITED
Yuichi YOSHIDA
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
BOTTLE CHANGE APPARATUS, SUBSTRATE TREATMENT APPARATUS, BOTTLE CHAN...
Publication number
20150078870
Publication date
Mar 19, 2015
TOKYO ELECTRON LIMITED
Arnaud Alain Jean Dauendorffer
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS