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Shinobu Tanaka
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Kumamoto-ken, JP
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Patents Grants
last 30 patents
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Patent Grant
Substrate process method and substrate process apparatus
Patent number
6,443,641
Issue date
Sep 3, 2002
Tokyo Electron Limited
Hideyuki Takamori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Substrate process method and substrate process apparatus
Patent number
6,261,007
Issue date
Jul 17, 2001
Tokyo Electron Limited
Hideyuki Takamori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
6,203,218
Issue date
Mar 20, 2001
Tokyo Electron Ltd.
Tsutae Omori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Substrate process method and substrate process apparatus
Publication number
20010031147
Publication date
Oct 18, 2001
Hideyuki Takamori
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Substrate process method and substrate process apparatus
Publication number
20010026691
Publication date
Oct 4, 2001
Hideyuki Takamori
H01 - BASIC ELECTRIC ELEMENTS