Shinobu Tokushima

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Kawasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of making a static pressure air bearing
- Patent number 6,735,867
- Issue date May 18, 2004
- Nikon Corporation
- Takuma Tsuda
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Static pressure air bearing
- Patent number 6,499,880
- Issue date Dec 31, 2002
- Nikon Corporation
- Takuma Tsuda
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Static air-bearing and stage apparatus using the bearing and optica...
- Patent number 6,328,473
- Issue date Dec 11, 2001
- Nikon Corporation
- Shinobu Tokushima
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
Static pressure air bearing
- Publication number 20020181808
- Publication date Dec 5, 2002
- Nikon Corporation
- Takuma Tsuda
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Static pressure air bearing
- Publication number 20020034345
- Publication date Mar 21, 2002
- Nikon Corporation
- Takuma Tsuda
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Charged-particle-beam microlithography stage including actuators fo...
- Publication number 20020021428
- Publication date Feb 21, 2002
- Katsushi Nakano
- H01 - BASIC ELECTRIC ELEMENTS