Shinpei Tokunaga

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Output signal processing circuit for eddy current sensor and output...
- Patent number 12,123,714
- Issue date Oct 22, 2024
- Ebara Corporation
- Hiroto Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Output signal processing circuit for eddy current sensor and output...
- Patent number 11,852,472
- Issue date Dec 26, 2023
- Ebara Corporation
- Hiroto Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Eddy current detection device and polishing apparatus
- Patent number 11,731,233
- Issue date Aug 22, 2023
- Ebara Corporation
- Taro Takahashi
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate polishing system, substrate polishing method and substrat...
- Patent number 11,633,828
- Issue date Apr 25, 2023
- Ebara Corporation
- Yuta Suzuki
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
EDDY CURRENT SENSOR, POLISHING APPARATUS, AND FILM THICKNESS DETECT...
- Publication number 20240210353
- Publication date Jun 27, 2024
- EBARA CORPORATION
- Taro TAKAHASHI
- G01 - MEASURING TESTING
Information Patent Application
OUTPUT SIGNAL PROCESSING CIRCUIT FOR EDDY CURRENT SENSOR AND OUTPUT...
- Publication number 20240077297
- Publication date Mar 7, 2024
- EBARA CORPORATION
- Hiroto YAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OUTPUT SIGNAL PROCESSING APPARATUS FOR EDDY CURRENT SENSOR
- Publication number 20220063056
- Publication date Mar 3, 2022
- EBARA CORPORATION
- Atsushi ABE
- G01 - MEASURING TESTING
Information Patent Application
OUTPUT SIGNAL PROCESSING CIRCUIT FOR EDDY CURRENT SENSOR AND OUTPUT...
- Publication number 20210199415
- Publication date Jul 1, 2021
- EBARA CORPORATION
- Hiroto YAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE POLISHING SYSTEM, SUBSTRATE POLISHING METHOD AND SUBSTRAT...
- Publication number 20200269380
- Publication date Aug 27, 2020
- EBARA CORPORATION
- Yuta Suzuki
- B24 - GRINDING POLISHING
Information Patent Application
EDDY CURRENT DETECTION DEVICE AND POLISHING APPARATUS
- Publication number 20200147747
- Publication date May 14, 2020
- EBARA CORPORATION
- Taro Takahashi
- B24 - GRINDING POLISHING