Shinrou Ohta

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Polishing monitoring method, polishing apparatus and monitoring app...
- Patent number 9,068,814
- Issue date Jun 30, 2015
- Ebara Corporation
- Taro Takahashi
- G01 - MEASURING TESTING
Information Patent Grant
Polishing endpoint detection method
- Patent number 8,777,694
- Issue date Jul 15, 2014
- Ebara Corporation
- Shinrou Ohta
- B24 - GRINDING POLISHING
Information Patent Grant
Method of making diagram for use in selection of wavelength of ligh...
- Patent number 8,585,460
- Issue date Nov 19, 2013
- Ebara Corporation
- Yoichi Kobayashi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing endpoint detection apparatus
- Patent number 8,568,199
- Issue date Oct 29, 2013
- Ebara Corporation
- Shinrou Ohta
- B24 - GRINDING POLISHING
Information Patent Grant
Method of making diagram for use in selection of wavelength of ligh...
- Patent number 8,388,408
- Issue date Mar 5, 2013
- Ebara Corporation
- Yoichi Kobayashi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing end point detection method
- Patent number 8,157,616
- Issue date Apr 17, 2012
- Ebara Corporation
- Noburu Shimizu
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing monitoring method and polishing apparatus
- Patent number 8,078,419
- Issue date Dec 13, 2011
- Ebara Corporation
- Yoichi Kobayashi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method
- Patent number 7,960,188
- Issue date Jun 14, 2011
- Ebara Corporation
- Shinrou Ohta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 7,780,503
- Issue date Aug 24, 2010
- Ebara Corporation
- Shinrou Ohta
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate polishing apparatus
- Patent number 7,547,242
- Issue date Jun 16, 2009
- Ebara Corporation
- Kazuto Hirokawa
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate polishing apparatus
- Patent number 7,507,144
- Issue date Mar 24, 2009
- Ebara Corporation
- Kazuto Hirokawa
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate polishing apparatus
- Patent number 7,214,122
- Issue date May 8, 2007
- Ebara Corporation
- Kazuto Hirokawa
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
POLISHING METHOD
- Publication number 20140030826
- Publication date Jan 30, 2014
- Shinrou Ohta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING ENDPOINT DETECTION METHOD AND POLISHING ENDPOINT DETECTIO...
- Publication number 20140024294
- Publication date Jan 23, 2014
- Kabushiki Kaisha Toshiba
- Shinrou OHTA
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF MAKING DIAGRAM FOR USE IN SELECTION OF WAVELENGTH OF LIGH...
- Publication number 20130149938
- Publication date Jun 13, 2013
- EBARA CORPORATION
- Yoichi KOBAYASHI
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING ENDPOINT DETECTION METHOD AND POLISHING ENDPOINT DETECTIO...
- Publication number 20110081829
- Publication date Apr 7, 2011
- Shinrou OHTA
- B24 - GRINDING POLISHING
Information Patent Application
Method of making diagram for use in selection of wavelength of ligh...
- Publication number 20100093260
- Publication date Apr 15, 2010
- EBARA CORPORATION
- Yoichi Kobayashi
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING END POINT DETECTION METHOD
- Publication number 20090298387
- Publication date Dec 3, 2009
- Noburu SHIMIZU
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING METHOD
- Publication number 20090286332
- Publication date Nov 19, 2009
- Shinrou OHTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Polishing apparatus and polishing method
- Publication number 20090130956
- Publication date May 21, 2009
- EBARA CORPORATION
- Shinrou Ohta
- B24 - GRINDING POLISHING
Information Patent Application
Polishing monitoring method and polishing apparatus
- Publication number 20090104847
- Publication date Apr 23, 2009
- Yoichi Kobayashi
- B24 - GRINDING POLISHING
Information Patent Application
Polishing monitoring method, polishing apparatus and monitoring app...
- Publication number 20090096446
- Publication date Apr 16, 2009
- Taro Takahashi
- G01 - MEASURING TESTING
Information Patent Application
Substrate polishing apparatus
- Publication number 20070173177
- Publication date Jul 26, 2007
- Kazuto Hirokawa
- B24 - GRINDING POLISHING
Information Patent Application
Substrate polishing apparatus
- Publication number 20070042679
- Publication date Feb 22, 2007
- Kazuto Hirokawa
- B24 - GRINDING POLISHING
Information Patent Application
Substrate polishing apparatus
- Publication number 20060105679
- Publication date May 18, 2006
- Kazuto Hirokawa
- B24 - GRINDING POLISHING

Shinrou Ohta

Person

Patents Grantslast 30 patents

Polishing monitoring method, polishing apparatus and monitoring app...

Polishing endpoint detection method

Method of making diagram for use in selection of wavelength of ligh...

Polishing endpoint detection apparatus

Method of making diagram for use in selection of wavelength of ligh...

Polishing end point detection method

Polishing monitoring method and polishing apparatus

Polishing method

Polishing apparatus and polishing method

Substrate polishing apparatus

Substrate polishing apparatus

Substrate polishing apparatus

Patents Applicationslast 30 patents

POLISHING METHOD

POLISHING ENDPOINT DETECTION METHOD AND POLISHING ENDPOINT DETECTIO...

METHOD OF MAKING DIAGRAM FOR USE IN SELECTION OF WAVELENGTH OF LIGH...

POLISHING ENDPOINT DETECTION METHOD AND POLISHING ENDPOINT DETECTIO...

Method of making diagram for use in selection of wavelength of ligh...

POLISHING END POINT DETECTION METHOD

POLISHING METHOD

Polishing apparatus and polishing method

Polishing monitoring method and polishing apparatus

Polishing monitoring method, polishing apparatus and monitoring app...

Substrate polishing apparatus

Substrate polishing apparatus

Substrate polishing apparatus