Shinsuke Asao

Follow

Person

Yamanashi-Ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Process system with transfer unit for object to be processed
- Patent number 6,395,094
- Issue date May 28, 2002
- Tokyo Electron Limited
- Keiichi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Auxiliary vacuum chamber and vacuum processing unit using same
- Patent number 6,234,107
- Issue date May 22, 2001
- Tokyo Electron Limited
- Keiichi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...