Shinsuke KIMURA

Person

Yokkaichi-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,921,428
- Issue date Mar 5, 2024
- Kioxia Corporation
- Yoshihiro Uozumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing device
- Patent number 10,978,316
- Issue date Apr 13, 2021
- TOSHIBA MEMORY CORPORATION
- Satoshi Nakaoka
- B08 - CLEANING
Information Patent Grant
Surface treatment apparatus and method for semiconductor substrate
- Patent number 10,573,508
- Issue date Feb 25, 2020
- TOSHIBA MEMORY CORPORATION
- Tatsuhiko Koide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment apparatus and substrate treatment method
- Patent number 10,453,729
- Issue date Oct 22, 2019
- TOSHIBA MEMORY CORPORATION
- Tatsuhiko Koide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment apparatus and substrate treatment method
- Patent number 10,290,491
- Issue date May 14, 2019
- TOSHIBA MEMORY CORPORATION
- Shinsuke Kimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor device and semiconductor manu...
- Patent number 10,032,658
- Issue date Jul 24, 2018
- TOSHIBA MEMORY CORPORATION
- Shinsuke Kimura
- B08 - CLEANING
Information Patent Grant
Apparatus and method of treating surface of semiconductor substrate
- Patent number 9,991,111
- Issue date Jun 5, 2018
- TOSHIBA MEMORY CORPORATION
- Yoshihiro Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method of treating surface of semiconductor substrate
- Patent number 9,859,111
- Issue date Jan 2, 2018
- TOSHIBA MEMORY CORPORATION
- Yoshihiro Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor device and semiconductor manu...
- Patent number 9,818,627
- Issue date Nov 14, 2017
- TOSHIBA MEMORY CORPORATION
- Shinsuke Kimura
- B08 - CLEANING
Information Patent Grant
Substrate treatment apparatus and substrate treatment method
- Patent number 9,748,091
- Issue date Aug 29, 2017
- TOSHIBA MEMORY CORPORATION
- Shinsuke Kimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor device and semiconductor manu...
- Patent number 9,583,331
- Issue date Feb 28, 2017
- Kabushiki Kaisha Toshiba
- Shinsuke Kimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 9,213,242
- Issue date Dec 15, 2015
- Kabushiki Kaisha Toshiba
- Yoshihiro Uozumi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor substrate surface treatment method
- Patent number 8,435,903
- Issue date May 7, 2013
- Kabushiki Kaisha Toshiba
- Yoshihiro Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 8,399,357
- Issue date Mar 19, 2013
- Kabushiki Kaisha Toshiba
- Yoshihiro Ogawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220181171
- Publication date Jun 9, 2022
- KIOXIA Corporation
- Yoshihiro UOZUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING DEVICE
- Publication number 20190259639
- Publication date Aug 22, 2019
- Toshiba Memory Corporation
- Satoshi NAKAOKA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190214277
- Publication date Jul 11, 2019
- Toshiba Memory Corporation
- Yoshihiro Uozumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
- Publication number 20190080947
- Publication date Mar 14, 2019
- Toshiba Memory Corporation
- Tatsuhiko Koide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD OF TREATING SURFACE OF SEMICONDUCTOR SUBSTRATE
- Publication number 20180082832
- Publication date Mar 22, 2018
- Toshiba Memory Corporation
- Yoshihiro Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...
- Publication number 20180040490
- Publication date Feb 8, 2018
- Toshiba Memory Corporation
- Shinsuke KIMURA
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
- Publication number 20170338102
- Publication date Nov 23, 2017
- Toshiba Memory Corporation
- Shinsuke KIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...
- Publication number 20170125267
- Publication date May 4, 2017
- KABUSHIKI KAISHA TOSHIBA
- Shinsuke KIMURA
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
- Publication number 20160293400
- Publication date Oct 6, 2016
- KABUSHIKI KAISHA TOSHIBA
- Shinsuke KIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20160071747
- Publication date Mar 10, 2016
- Kabushiki Kaisha Toshiba
- Yoshihiro Uozumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD OF TREATING SURFACE OF SEMICONDUCTOR SUBSTRATE
- Publication number 20160049289
- Publication date Feb 18, 2016
- Kabushiki Kaisha Toshiba
- Yoshihiro Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE TREATMENT APPARATUS AND METHOD FOR SEMICONDUCTOR SUBSTRATE
- Publication number 20150371845
- Publication date Dec 24, 2015
- Kabushiki Kaisha Toshiba
- Tatsuhiko KOIDE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...
- Publication number 20140206202
- Publication date Jul 24, 2014
- KABUSHIKI KAISHA TOSHIBA
- Shinsuke KIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20130008868
- Publication date Jan 10, 2013
- Yoshihiro UOZUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20120088357
- Publication date Apr 12, 2012
- Yoshihiro OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR SUBSTRATE SURFACE TREATMENT METHOD
- Publication number 20110269313
- Publication date Nov 3, 2011
- Yoshihiro OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD OF TREATING SURFACE OF SEMICONDUCTOR SUBSTRATE
- Publication number 20110143541
- Publication date Jun 16, 2011
- Yoshihiro OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD OF TREATING SURFACE OF SEMICONDUCTOR SUBSTRATE
- Publication number 20110143545
- Publication date Jun 16, 2011
- Hisashi Okuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE TREATMENT APPARATUS AND METHOD FOR SEMICONDUCTOR SUBSTRATE
- Publication number 20110139192
- Publication date Jun 16, 2011
- Tatsuhiko KOIDE
- H01 - BASIC ELECTRIC ELEMENTS

Shinsuke KIMURA

Person

Patents Grantslast 30 patents

Substrate processing method and substrate processing apparatus

Semiconductor processing device

Surface treatment apparatus and method for semiconductor substrate

Substrate treatment apparatus and substrate treatment method

Substrate treatment apparatus and substrate treatment method

Manufacturing method of semiconductor device and semiconductor manu...

Apparatus and method of treating surface of semiconductor substrate

Apparatus and method of treating surface of semiconductor substrate

Manufacturing method of semiconductor device and semiconductor manu...

Substrate treatment apparatus and substrate treatment method

Manufacturing method of semiconductor device and semiconductor manu...

Substrate processing method and substrate processing apparatus

Semiconductor substrate surface treatment method

Method of manufacturing semiconductor device

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SEMICONDUCTOR PROCESSING DEVICE

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD

APPARATUS AND METHOD OF TREATING SURFACE OF SEMICONDUCTOR SUBSTRATE

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...

SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...

SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

APPARATUS AND METHOD OF TREATING SURFACE OF SEMICONDUCTOR SUBSTRATE

SURFACE TREATMENT APPARATUS AND METHOD FOR SEMICONDUCTOR SUBSTRATE

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SEMICONDUCTOR SUBSTRATE SURFACE TREATMENT METHOD

APPARATUS AND METHOD OF TREATING SURFACE OF SEMICONDUCTOR SUBSTRATE

APPARATUS AND METHOD OF TREATING SURFACE OF SEMICONDUCTOR SUBSTRATE

SURFACE TREATMENT APPARATUS AND METHOD FOR SEMICONDUCTOR SUBSTRATE