Shintaro AICHI

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Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of managing imprint apparatus, imprint apparatus, method of...
- Patent number 11,194,248
- Issue date Dec 7, 2021
- CANON KABUSHIKIKAISHA
- Shintaro Aichi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus, temperature regulating system, and device manuf...
- Patent number 8,982,315
- Issue date Mar 17, 2015
- Canon Kabushiki Kaisha
- Shintaro Aichi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 8,184,261
- Issue date May 22, 2012
- Canon Kabushiki Kaisha
- Shintaro Aichi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 7,486,378
- Issue date Feb 3, 2009
- Canon Kabushiki Kaisha
- Shintaro Aichi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,317,505
- Issue date Jan 8, 2008
- Canon Kabushiki Kaisha
- Shintaro Aichi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, and device manufacturing method
- Patent number 7,283,199
- Issue date Oct 16, 2007
- Canon Kabushiki Kaisha
- Shintaro Aichi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
CLEANING APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURIN...
- Publication number 20240316488
- Publication date Sep 26, 2024
- Canon Kabushiki Kaisha
- SHINTARO AICHI
- G01 - MEASURING TESTING
Information Patent Application
AIR COOLING APPARATUS, ENVIRONMENTAL CONTROL APPARATUS, LITHOGRAPHY...
- Publication number 20240201603
- Publication date Jun 20, 2024
- Canon Kabushiki Kaisha
- SHINTARO AICHI
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
METHOD OF MANAGING IMPRINT APPARATUS, IMPRINT APPARATUS, METHOD OF...
- Publication number 20190302613
- Publication date Oct 3, 2019
- Canon Kabushiki Kaisha
- Shintaro Aichi
- B82 - NANO-TECHNOLOGY
Information Patent Application
Exposure Apparatus
- Publication number 20090059188
- Publication date Mar 5, 2009
- Canon Kabushiki Kaisha
- Shintaro AICHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, TEMPERATURE REGULATING SYSTEM, AND DEVICE MANUF...
- Publication number 20080259293
- Publication date Oct 23, 2008
- Canon Kabushiki Kaisha
- Shintaro Aichi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20070046911
- Publication date Mar 1, 2007
- Canon Kabushiki Kaisha
- Shintaro AICHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, and device manufacturing method
- Publication number 20060061745
- Publication date Mar 23, 2006
- Canon Kabushiki Kaisha
- Shintaro Aichi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20050110968
- Publication date May 26, 2005
- Canon Kabushiki Kaisha
- Shintaro Aichi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Shintaro AICHI

Person

Patents Grantslast 30 patents

Method of managing imprint apparatus, imprint apparatus, method of...

Exposure apparatus, temperature regulating system, and device manuf...

Exposure apparatus

Exposure apparatus

Exposure apparatus and device manufacturing method

Exposure apparatus, and device manufacturing method

Patents Applicationslast 30 patents

CLEANING APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURIN...

AIR COOLING APPARATUS, ENVIRONMENTAL CONTROL APPARATUS, LITHOGRAPHY...

METHOD OF MANAGING IMPRINT APPARATUS, IMPRINT APPARATUS, METHOD OF...

Exposure Apparatus

EXPOSURE APPARATUS, TEMPERATURE REGULATING SYSTEM, AND DEVICE MANUF...

EXPOSURE APPARATUS

Exposure apparatus, and device manufacturing method

Exposure apparatus and device manufacturing method