Shintaro Kaido

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of forming metal oxide hardmask
- Patent number 8,901,016
- Issue date Dec 2, 2014
- ASM Japan K.K.
- Jeongseok Ha
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method of Forming Metal Oxide Hardmask
- Publication number 20120164846
- Publication date Jun 28, 2012
- ASM JAPAN K.K.
- Jeongseok Ha
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Plasma CVD film formation apparatus provided with mask
- Publication number 20070065597
- Publication date Mar 22, 2007
- ASM JAPAN K.K.
- Shintaro Kaido
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...