Shintaro SUDA

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Kawasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Sputtering apparatus and substrate processing apparatus
- Patent number 10,615,012
- Issue date Apr 7, 2020
- Canon Anelva Corporation
- Shigenori Ishihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus and substrate processing apparatus
- Patent number 9,997,339
- Issue date Jun 12, 2018
- Canon Anelva Corporation
- Shigenori Ishihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SPUTTERING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180261440
- Publication date Sep 13, 2018
- Canon ANELVA Corporation
- Shigenori Ishihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20150262796
- Publication date Sep 17, 2015
- Canon ANELVA Corporation
- Shigenori ISHIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTERING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20150262797
- Publication date Sep 17, 2015
- Canon ANELVA Corporation
- Shigenori ISHIHARA
- H01 - BASIC ELECTRIC ELEMENTS