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Shintaro YOSHIDA
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Takasago-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Li-containing oxide target assembly
Patent number
9,870,902
Issue date
Jan 16, 2018
Kobelco Research Institute, Inc.
Yuichi Taketomi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
LI-CONTAINING OXIDE TARGET ASSEMBLY
Publication number
20160064200
Publication date
Mar 3, 2016
KOBELCO RESEARCH INSTITUTE, INC.
Yuichi TAKETOMI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...