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Shintarou Narioka
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Utsunomiya-shi, JP
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last 30 patents
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Patent Grant
Imprint apparatus, and article manufacturing method
Patent number
9,339,970
Issue date
May 17, 2016
Canon Kabushiki Kaisha
Shinichi Shudo
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD
Publication number
20130241096
Publication date
Sep 19, 2013
Canon Kabushiki Kaisha
Shinichi Shudo
B82 - NANO-TECHNOLOGY
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Patent Application
IMPRINTING METHOD
Publication number
20120080820
Publication date
Apr 5, 2012
Canon Kabushiki Kaisha
Shintarou Narioka
B82 - NANO-TECHNOLOGY