Shinya Hirano

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Yokohama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus with real-time particle filter
- Patent number 6,875,326
- Issue date Apr 5, 2005
- Hitachi, Ltd.
- Hiroshi Inaba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus with real-time particle filter
- Patent number 6,638,403
- Issue date Oct 28, 2003
- Hitachi, Ltd.
- Hiroshi Inaba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Plasma processing apparatus with real-time particle filter
- Publication number 20030094366
- Publication date May 22, 2003
- Hiroshi Inaba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...