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Shinya Houman
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Tama-shi, JP
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last 30 patents
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Patent Grant
Substrate holder, deposition method using substrate holder, hard di...
Patent number
7,927,473
Issue date
Apr 19, 2011
Canon Anelva Corporation
Shinya Houman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE HOLDER, DEPOSITION METHOD USING SUBSTRATE HOLDER, HARD DI...
Publication number
20100189912
Publication date
Jul 29, 2010
Canon ANELVA Corporation
Shinya Houman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CARRIER WITH DEPOSITION SHIELD
Publication number
20090308317
Publication date
Dec 17, 2009
Canon ANELVA Corporation
Hiroshi Sone
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...