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Shinya Iida
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Tama, JP
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last 30 patents
Information
Patent Grant
Vapor phase growth on semiconductor wafers
Patent number
4,745,088
Issue date
May 17, 1988
Hitachi, Ltd.
Yosuke Inoue
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Dry-etching process
Patent number
4,581,101
Issue date
Apr 8, 1986
Asahi Glass Company Ltd.
Makoto Senoue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Surface acoustic wave device and method for manufacturing the same
Patent number
4,427,515
Issue date
Jan 24, 1984
Hitachi, Ltd.
Akitsuna Yuhara
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Method for dry-etching
Patent number
4,412,119
Issue date
Oct 25, 1983
Hitachi, Ltd.
Hideo Komatsu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma etcher having isotropic subchamber with gas outlet for produ...
Patent number
4,352,974
Issue date
Oct 5, 1982
Hitachi, Ltd.
Tatsumi Mizutani
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method for preventing corrosion of Al and Al alloys
Patent number
4,308,089
Issue date
Dec 29, 1981
Hitachi, Ltd.
Shinya Iida
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for monitoring etching
Patent number
4,289,188
Issue date
Sep 15, 1981
Hitachi, Ltd.
Tatsumi Mizutani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for dry-etching aluminum and aluminum alloys
Patent number
4,267,013
Issue date
May 12, 1981
Hitachi, Ltd.
Shinya Iida
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...