TREA

Shinya IWASHITA

Follow

Person

  • Nirasaki City, JP
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Film forming apparatus
    • Patent number 12,027,344
    • Issue date Jul 2, 2024
    • Tokyo Electron Limited
    • Shinya Iwashita
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Film forming apparatus and film forming method
    • Patent number 11,658,008
    • Issue date May 23, 2023
    • Tokyo Electron Limited
    • Munehito Kagaya
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing method
    • Patent number 11,450,512
    • Issue date Sep 20, 2022
    • Tokyo Electron Limited
    • Shinya Iwashita
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Film forming apparatus, cleaning method for film forming apparatus...
    • Patent number 11,081,322
    • Issue date Aug 3, 2021
    • Tokyo Electron Limited
    • Naotaka Noro
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Film forming method
    • Patent number 10,872,764
    • Issue date Dec 22, 2020
    • Tokyo Electron Limited
    • Shinya Iwashita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20230051432
    • Publication date Feb 16, 2023
    • TOKYO ELECTRON LIMITED
    • Shinya IWASHITA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
    • Publication number 20210384009
    • Publication date Dec 9, 2021
    • TOKYO ELECTRON LIMITED
    • Satoru KAWAKAMI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMING APPARATUS AND FILM FORMING METHOD
    • Publication number 20210375589
    • Publication date Dec 2, 2021
    • TOKYO ELECTRON LIMITED
    • Munehito KAGAYA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS AND FILM FORMING METHOD
    • Publication number 20210301402
    • Publication date Sep 30, 2021
    • TOKYO ELECTRON LIMITED
    • Yusuke SUZUKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma Processing Method
    • Publication number 20210142982
    • Publication date May 13, 2021
    • TOKYO ELECTRON LIMITED
    • Shinya IWASHITA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20190385815
    • Publication date Dec 19, 2019
    • TOKYO ELECTRON LIMITED
    • Shinya IWASHITA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Substrate Processing Method and Substrate Processing Apparatus
    • Publication number 20190181015
    • Publication date Jun 13, 2019
    • TOKYO ELECTRON LIMITED
    • Tomoaki OGIWARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMING METHOD
    • Publication number 20190088475
    • Publication date Mar 21, 2019
    • TOKYO ELECTRON LIMITED
    • Shinya Iwashita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS, CLEANING METHOD FOR FILM FORMING APPARATUS...
    • Publication number 20180108518
    • Publication date Apr 19, 2018
    • TOKYO ELECTRON LIMITED
    • Naotaka Noro
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20170294319
    • Publication date Oct 12, 2017
    • TOKYO ELECTRON LIMITED
    • Tomoaki OGIWARA
    • H01 - BASIC ELECTRIC ELEMENTS