Shinya Kitano

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Substrate conveying robot and substrate processing system with pair...
- Patent number 10,381,257
- Issue date Aug 13, 2019
- Kawasaki Jukogyo Kabushiki Kaisha
- Mark Tang
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Method of wafer system interlock for the protection of equipment an...
- Patent number 9,002,504
- Issue date Apr 7, 2015
- Kawasaki Robotics (USA) Inc.
- Thomas Miu
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CONVEYING ROBOT AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20170062264
- Publication date Mar 2, 2017
- KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Mark TANG
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
METHOD OF WAFER SYSTEM INTERLOCK FOR THE PROTECTION OF EQUIPMENT AN...
- Publication number 20140277727
- Publication date Sep 18, 2014
- KAWASAKI ROBOTICS (USA), INC.
- Thomas Miu
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC