Shinya KUREBAYASHI

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Patents Grantslast 30 patents

Information Patent Grant
Temperature measurement member, inspection apparatus, and temperatu...
- Patent number 11,293,814
- Issue date Apr 5, 2022
- Tokyo Electron Limited
- Yoshihito Yamasaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DEVICE INSPECTION APPARATUS AND DEVICE INSPECTION METHOD
- Publication number 20240192257
- Publication date Jun 13, 2024
- TOKYO ELECTRON LIMITED
- Shinya KUREBAYASHI
- G01 - MEASURING TESTING
Information Patent Application
Temperature Measurement Member, Inspection Apparatus, and Temperatu...
- Publication number 20200209072
- Publication date Jul 2, 2020
- TOKYO ELECTRON LIMITED
- Yoshihito YAMASAKI
- G01 - MEASURING TESTING
Information Patent Application
WAFER TESTING APPARATUS AND METHOD OF DIAGNOSING WAFER TESTING APPA...
- Publication number 20200088828
- Publication date Mar 19, 2020
- TOKYO ELECTRON LIMITED
- Shinya KUREBAYASHI
- G01 - MEASURING TESTING