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Shinya MOCHIZUKI
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Shiroyama-Machi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method of object transfer for a heat treatment system
Patent number
8,147,241
Issue date
Apr 3, 2012
Tokyo Electron Limited
Shinya Mochizuki
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Heat treatment system and method therefore
Patent number
7,819,658
Issue date
Oct 26, 2010
Tokyo Electron Limited
Kazunari Sakata
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Heat treatment system and a method for cooling a loading chamber
Patent number
7,210,924
Issue date
May 1, 2007
Tokyo Electron Limited
Shinya Mochizuki
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Heat treatment system and a method for cooling a loading chamber
Patent number
7,059,849
Issue date
Jun 13, 2006
Tokyo Electron Limited
Kazunari Sakata
F27 - FURNACES KILNS OVENS RETORTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF OBJECT TRANSFER FOR A HEAT TREATMENT SYSTEM
Publication number
20100316968
Publication date
Dec 16, 2010
TOKYO ELECTRON LIMITED
Shinya MOCHIZUKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Heat treatment system and method therefore
Publication number
20070166657
Publication date
Jul 19, 2007
Kazunari Sakata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Heat treatment system and a method for cooling a loading chamber
Publication number
20050053891
Publication date
Mar 10, 2005
Shinya Mochizuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vertical heat treatment system, method for controlling vertical hea...
Publication number
20020023458
Publication date
Feb 28, 2002
Kazunari Sakata
H01 - BASIC ELECTRIC ELEMENTS