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Shinya Morikita

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  • Hillsboro, OR, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Pattern forming method
    • Patent number 9,412,618
    • Issue date Aug 9, 2016
    • Tokyo Electron Limited
    • Shinya Morikita
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Plasma etching method
    • Patent number 7,488,689
    • Issue date Feb 10, 2009
    • Tokyo Electron Limited
    • Shinya Morikita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Etching method and apparatus, computer program and computer readabl...
    • Patent number 7,387,743
    • Issue date Jun 17, 2008
    • Tokyo Electron Limited
    • Shinya Morikita
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    PATTERN FORMING METHOD
    • Publication number 20160042970
    • Publication date Feb 11, 2016
    • TOKYO ELECTRON LIMITED
    • Shinya Morikita
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Etching method and apparatus, computer program and computer readabl...
    • Publication number 20060219657
    • Publication date Oct 5, 2006
    • TOKYO ELECTRON LIMITED
    • Shinya Morikita
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma etching method
    • Publication number 20060118520
    • Publication date Jun 8, 2006
    • TOKYO ELECTRON LIMITED
    • Shinya Morikita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...