Shinya Murakami

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Kumamoto-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Washing apparatus, and washing method
- Patent number 5,887,604
- Issue date Mar 30, 1999
- Tokyo Electron Limited
- Shinya Murakami
- B08 - CLEANING
Information Patent Grant
Method for washing objects
- Patent number 5,782,990
- Issue date Jul 21, 1998
- Tokyo Electron Limited
- Shinya Murakami
- B08 - CLEANING
Information Patent Grant
Washing apparatus, and washing method
- Patent number 5,671,764
- Issue date Sep 30, 1997
- Tokyo Electron Limited
- Shinya Murakami
- B08 - CLEANING
Information Patent Grant
Substrates-washing apparatus
- Patent number 5,503,171
- Issue date Apr 2, 1996
- Tokyo Electron Limited
- Kenji Yokomizo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Washing apparatus, and washing method
- Patent number 5,488,964
- Issue date Feb 6, 1996
- Tokyo Electron Limited
- Shinya Murakami
- B08 - CLEANING