Shinya MURAKAMI

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Kawasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Pattern inspection device and pattern inspection method
- Patent number 9,188,554
- Issue date Nov 17, 2015
- Hitachi High-Technologies Corporation
- Chie Shishido
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection method and defect inspection apparatus
- Patent number 8,953,868
- Issue date Feb 10, 2015
- Hitachi High-Technologies Corporation
- Shinya Murakami
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
PATTERN INSPECTION DEVICE AND PATTERN INSPECTION METHOD
- Publication number 20150212019
- Publication date Jul 30, 2015
- Hitachi High-Technologies Corporation
- Chie Shishido
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION METHOD AND DEFECT INSPECTION APPARATUS
- Publication number 20130322737
- Publication date Dec 5, 2013
- Hitachi High-Technologies Corporation
- Shinya MURAKAMI
- G06 - COMPUTING CALCULATING COUNTING