Shinya NAGASAWA

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Kawasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Deposition apparatus and electronic device manufacturing method
- Patent number 9,593,412
- Issue date Mar 14, 2017
- Canon Anelva Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus and method of manufacturing electronic device
- Patent number 9,322,092
- Issue date Apr 26, 2016
- Canon Anelva Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus and electronic device manufacturing method
- Patent number 8,663,437
- Issue date Mar 4, 2014
- Canon Anelva Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DEPOSITION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20140054164
- Publication date Feb 27, 2014
- Canon ANELVA Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING APPARATUS AND METHOD OF MANUFACTURING ELECTRONIC DEVICE
- Publication number 20120325651
- Publication date Dec 27, 2012
- Canon ANELVA Corporation
- Nobuo YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20100224482
- Publication date Sep 9, 2010
- Canon ANELVA Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...