Shinya Nakagawa

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Kodaira, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of making semiconductor integrated circuit, pattern detectin...
- Patent number 5,432,608
- Issue date Jul 11, 1995
- Hitachi, Ltd.
- Susumu Komoriya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of making semiconductor integrated circuit, pattern detectin...
- Patent number 5,260,771
- Issue date Nov 9, 1993
- Hitachi, Ltd.
- Susumu Komoriya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of making semiconductor integrated circuit, pattern detectin...
- Patent number 5,094,539
- Issue date Mar 10, 1992
- Hitachi, Ltd.
- Susumu Komoriya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and exposure apparatus
- Patent number 5,025,284
- Issue date Jun 18, 1991
- Hitachi, Ltd.
- Susumu Komoriya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and exposure apparatus
- Patent number 4,974,018
- Issue date Nov 27, 1990
- Hitachi, Ltd.
- Susumu Komoriya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and exposure apparatus
- Patent number 4,699,505
- Issue date Oct 13, 1987
- Hitachi, Ltd.
- Susumu Komoriya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY