TREA

Shinya NASUKAWA

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  • Oshu City, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Heat treatment apparatus and film deposition method
    • Patent number 11,581,201
    • Issue date Feb 14, 2023
    • Tokyo Electron Limited
    • Kazuteru Obara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Processing apparatus
    • Patent number 11,302,542
    • Issue date Apr 12, 2022
    • Tokyo Electron Limited
    • Masato Kadobe
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    HEAT TREATMENT APPARATUS AND FILM DEPOSITION METHOD
    • Publication number 20200303222
    • Publication date Sep 24, 2020
    • TOKYO ELECTRON LIMITED
    • Kazuteru Obara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PROCESSING APPARATUS
    • Publication number 20200227293
    • Publication date Jul 16, 2020
    • TOKYO ELECTRON LIMITED
    • Masato KADOBE
    • F27 - FURNACES KILNS OVENS RETORTS