Shinya Okabe

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film forming apparatus and gas injection member used therefor
- Patent number 11,069,512
- Issue date Jul 20, 2021
- Tokyo Electron Limited
- Shinya Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of performing a surface treatment on a mounting table, the m...
- Patent number 10,738,374
- Issue date Aug 11, 2020
- Tokyo Electron Limited
- Shinya Okabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum processing apparatus and operation method thereof
- Patent number 10,731,248
- Issue date Aug 4, 2020
- Tokyo Electron Limited
- Hideaki Yamasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method
- Patent number 10,319,585
- Issue date Jun 11, 2019
- Tokyo Electron Limited
- Kohichi Satoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
TiN film forming method and storage medium
- Patent number 9,133,548
- Issue date Sep 15, 2015
- Tokyo Electron Limited
- Hideaki Yamasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing metallic film by plasma CVD and storage medium
- Patent number 8,906,471
- Issue date Dec 9, 2014
- Tokyo Electron Limited
- Shinya Okabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20240337022
- Publication date Oct 10, 2024
- TOKYO ELECTRON LIMITED
- Kensaku NARUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD
- Publication number 20180102244
- Publication date Apr 12, 2018
- TOKYO ELECTRON LIMITED
- Kohichi SATOH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS AND GAS INJECTION MEMBER USED THEREFOR
- Publication number 20180047541
- Publication date Feb 15, 2018
- Shinya OKABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PERFORMING A SURFACE TREATMENT ON A MOUNTING TABLE, THE M...
- Publication number 20170204505
- Publication date Jul 20, 2017
- TOKYO ELECTRON LIMITED
- Shinya OKABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM PROCESSING APPARATUS AND OPERATION METHOD THEREOF
- Publication number 20170204518
- Publication date Jul 20, 2017
- Hideaki YAMASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TiN FILM FORMING METHOD AND STORAGE MEDIUM
- Publication number 20140206189
- Publication date Jul 24, 2014
- TOKYO ELECTRON LIMITED
- Hideaki YAMASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING METALLIC FILM AND MEMORY MEDIUM
- Publication number 20110086184
- Publication date Apr 14, 2011
- TOKYO ELECTRON LIMITED
- Shinya Okabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Worktable device, film formation apparatus, and film formation meth...
- Publication number 20050257747
- Publication date Nov 24, 2005
- Satoshi Wakabayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Shinya Okabe

Person

Patents Grantslast 30 patents

Film forming apparatus and gas injection member used therefor

Method of performing a surface treatment on a mounting table, the m...

Vacuum processing apparatus and operation method thereof

Film forming method

TiN film forming method and storage medium

Method of depositing metallic film by plasma CVD and storage medium

Patents Applicationslast 30 patents

FILM FORMING APPARATUS AND FILM FORMING METHOD

FILM FORMING METHOD

FILM FORMING APPARATUS AND GAS INJECTION MEMBER USED THEREFOR

METHOD OF PERFORMING A SURFACE TREATMENT ON A MOUNTING TABLE, THE M...

VACUUM PROCESSING APPARATUS AND OPERATION METHOD THEREOF

TiN FILM FORMING METHOD AND STORAGE MEDIUM

METHOD OF DEPOSITING METALLIC FILM AND MEMORY MEDIUM

Worktable device, film formation apparatus, and film formation meth...