Shinya OKANO

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Transfer device, processing system, and transfer method
- Patent number 12,170,216
- Issue date Dec 17, 2024
- Tokyo Electron Limited
- Shinya Okano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer method and substrate transfer module
- Patent number 11,088,001
- Issue date Aug 10, 2021
- Tokyo Electron Limited
- Takashi Sugimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cooling method, substrate transfer method, and load-lock...
- Patent number 10,115,611
- Issue date Oct 30, 2018
- Tokyo Electron Limited
- Hiromitsu Sakaue
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSFER METHOD
- Publication number 20240153807
- Publication date May 9, 2024
- TOKYO ELECTRON LIMITED
- Nanako SHINODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TRANSFERRING SUBSTRATE AND METHOD FOR TRANSFERRING SU...
- Publication number 20230170239
- Publication date Jun 1, 2023
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER DEVICE, PROCESSING SYSTEM, AND TRANSFER METHOD
- Publication number 20230038276
- Publication date Feb 9, 2023
- TOKYO ELECTRON LIMITED
- Shinya OKANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEACHING METHOD FOR TRANSFER DEVICE, AND TRANSFER SYSTEM
- Publication number 20220299980
- Publication date Sep 22, 2022
- TOKYO ELECTRON LIMITED
- Takashi SUGIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING DEVICE AND HEATING METHOD
- Publication number 20220093422
- Publication date Mar 24, 2022
- TOKYO ELECTRON LIMITED
- Takashi SUGIMOTO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
HEATING DEVICE, SUBSTRATE PROCESSING SYSTEM, AND HEATING METHOD
- Publication number 20210398830
- Publication date Dec 23, 2021
- TOKYO ELECTRON LIMITED
- Takashi SUGIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER METHOD AND SUBSTRATE TRANSFER MODULE
- Publication number 20200098604
- Publication date Mar 26, 2020
- TOKYO ELECTRON LIMITED
- Takashi SUGIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE COOLING METHOD, SUBSTRATE TRANSFER METHOD, AND LOAD-LOCK...
- Publication number 20170117169
- Publication date Apr 27, 2017
- TOKYO ELECTRON LIMITED
- Hiromitsu SAKAUE
- H01 - BASIC ELECTRIC ELEMENTS

Shinya OKANO

Person

Patents Grantslast 30 patents

Transfer device, processing system, and transfer method

Substrate transfer method and substrate transfer module

Substrate cooling method, substrate transfer method, and load-lock...

Patents Applicationslast 30 patents

SUBSTRATE TRANSFER METHOD

APPARATUS FOR TRANSFERRING SUBSTRATE AND METHOD FOR TRANSFERRING SU...

TRANSFER DEVICE, PROCESSING SYSTEM, AND TRANSFER METHOD

TEACHING METHOD FOR TRANSFER DEVICE, AND TRANSFER SYSTEM

HEATING DEVICE AND HEATING METHOD

HEATING DEVICE, SUBSTRATE PROCESSING SYSTEM, AND HEATING METHOD

SUBSTRATE TRANSFER METHOD AND SUBSTRATE TRANSFER MODULE

SUBSTRATE COOLING METHOD, SUBSTRATE TRANSFER METHOD, AND LOAD-LOCK...