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Shinya Shibata
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Osaka, JP
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Patents Grants
last 30 patents
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Patent Grant
Insulating film for semiconductor device, process and apparatus for...
Patent number
8,288,294
Issue date
Oct 16, 2012
Mitsubishi Heavy Industries, Ltd.
Hidetaka Kafuku
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
INSULATING FILM FOR SEMICONDUCTOR DEVICE, PROCESS AND APPARATUS FOR...
Publication number
20110266660
Publication date
Nov 3, 2011
Mitsubishi Electric Corporation
Hidetaka Kafuku
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...