Shinya Shimizu

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate transfer system, substrate transfer apparatus and storage...
- Patent number 8,121,723
- Issue date Feb 21, 2012
- Tokyo Electron Limited
- Toshihiko Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer system and transfer method of object to be processed
- Patent number 7,826,918
- Issue date Nov 2, 2010
- Tokyo Electron Limited
- Toshihiko Iijima
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate transfer apparatus and method, and storage medium
- Patent number 7,458,469
- Issue date Dec 2, 2008
- Tokyo Electron Limited
- Hiroki Hosaka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Substrate transfer system, substrate transfer apparatus and storage...
- Publication number 20070062446
- Publication date Mar 22, 2007
- TOKYO ELECTON LIMITED
- Toshihiko Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate transfer apparatus and method, and storage medium
- Publication number 20070031222
- Publication date Feb 8, 2007
- TOKYO ELECTRON LIMITED
- Hiroki Hosaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transfer system and transfer method of object to be processed
- Publication number 20060152211
- Publication date Jul 13, 2006
- TOKYO ELECTRON LIMITED
- Toshihiko Iijima
- G05 - CONTROLLING REGULATING