Shinya Tanoue

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Interlock apparatus for a transfer machine
- Patent number 6,336,054
- Issue date Jan 1, 2002
- Tokyo Electron Limited
- Yoshiharu Ota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conveying unit and substrate processing unit
- Patent number 6,203,617
- Issue date Mar 20, 2001
- Tokyo Electron Limited
- Shinya Tanoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interlock apparatus for a transfer machine
- Patent number 5,963,449
- Issue date Oct 5, 1999
- Tokyo Electron Limited
- Yoshiharu Ota
- H01 - BASIC ELECTRIC ELEMENTS