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Shinya Ueda
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method for forming silicon nitride film selectively on top/bottom p...
Patent number
11,676,812
Issue date
Jun 13, 2023
ASM IP Holding B.V.
Dai Ishikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of depositing material onto a surface and structure formed a...
Patent number
11,355,338
Issue date
Jun 7, 2022
ASM IP Holding B.V.
Shinya Ueda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for forming silicon nitride film selectively on top surface
Patent number
10,720,322
Issue date
Jul 21, 2020
ASM IP Holding B.V.
Dai Ishikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma enhanced atomic layer deposition (PEALD) of SiN using silico...
Patent number
10,580,645
Issue date
Mar 3, 2020
ASM IP Holding B.V.
Shinya Ueda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for forming silicon nitride film selectively on sidewalls or...
Patent number
10,529,554
Issue date
Jan 7, 2020
ASM IP Holding B.V.
Dai Ishikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for forming a silicon nitride film
Patent number
10,381,219
Issue date
Aug 13, 2019
ASM IP Holding B.V.
Shinya Ueda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF FABRICATING THE SAME
Publication number
20230323558
Publication date
Oct 12, 2023
ASM IP Holding B.V.
SungHoon Jun
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND SYSTEM FOR FORMING SILICON NITRIDE ON A SIDEWALL OF A FE...
Publication number
20220108881
Publication date
Apr 7, 2022
ASM IP HOLDING B.V.
Tomohiro Kubota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SILICON NITRIDE AND SILICON OXIDE DEPOSITION METHODS USING FLUORINE...
Publication number
20220005693
Publication date
Jan 6, 2022
ASM IP HOLDING B.V.
Takashi Mizoguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING A STRUCTURE INCLUDING SILICON OXIDE
Publication number
20210143003
Publication date
May 13, 2021
ASM IP HOLDING B.V.
Hideaki Fukuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF DEPOSITING MATERIAL ONTO A SURFACE AND STRUCTURE FORMED A...
Publication number
20200357631
Publication date
Nov 12, 2020
ASM IP HOLDING B.V.
Shinya Ueda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FORMING SILICON NITRIDE FILM SELECTIVELY ON TOP/BOTTOM P...
Publication number
20200321209
Publication date
Oct 8, 2020
ASM IP HOLDING B.V.
Dai Ishikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ENHANCED ATOMIC LAYER DEPOSITION (PEALD) OF SiN USING SILICO...
Publication number
20190333753
Publication date
Oct 31, 2019
ASM IP HOLDING B.V.
Shinya Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING SILICON NITRIDE FILM SELECTIVELY ON SIDEWALLS OF...
Publication number
20190057857
Publication date
Feb 21, 2019
ASM IP HOLDING B.V.
Dai Ishikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING SILICON NITRIDE FILM SELECTIVELY ON SIDEWALLS OR...
Publication number
20170250068
Publication date
Aug 31, 2017
ASM IP HOLDING B.V.
Dai Ishikawa
H01 - BASIC ELECTRIC ELEMENTS