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Shinya UENO
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Charged particle beam apparatus
Patent number
10,755,890
Issue date
Aug 25, 2020
HITACHI HIGH-TECH CORPORATION
Shinya Ueno
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Charged Particle Beam Apparatus
Publication number
20180286627
Publication date
Oct 4, 2018
Hitachi High-Technologies Corporation
Shinya UENO
H01 - BASIC ELECTRIC ELEMENTS