Shinya Yamada

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Sammu-shi, JP

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Patents Applicationslast 30 patents

Information Patent Application
MAGNETRON SPUTTERING CATHODE AND FILM FORMATION APPARATUS
- Publication number 20120097534
- Publication date Apr 26, 2012
- ULVAC, Inc.
- Hirohisa Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...