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Shinya YAMANAKA

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Patents Applicationslast 30 patents

  • Information Patent Application

    UPPER ELECTRODE AND PLASMA PROCESSING APPARATUS
    • Publication number 20230298864
    • Publication date Sep 21, 2023
    • TOKYO ELECTRON LIMITED
    • Shinya YAMANAKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20230268164
    • Publication date Aug 24, 2023
    • TOKYO ELECTRON LIMITED
    • Hideki SUGIYAMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...