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Shinyo Kimoto
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Kanagawa, JP
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last 30 patents
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Patent Grant
Cylinder, load port using it, and production system
Patent number
6,652,212
Issue date
Nov 25, 2003
CKD Corporation
Shinyo Kimoto
F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Patents Applications
last 30 patents
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Patent Application
Substrate processing apparatus, substrate processing system, and su...
Publication number
20020182037
Publication date
Dec 5, 2002
Semiconductor Leading Edge Technologies, Inc.
Shinyo Kimoto
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Cylinder, load port using it, and production system
Publication number
20020033606
Publication date
Mar 21, 2002
Shinyo Kimoto
H01 - BASIC ELECTRIC ELEMENTS