Shiow-Hwei Hwang

Person

San Ramon, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Inspection system including parallel imaging paths with multiple an...
- Patent number 10,429,319
- Issue date Oct 1, 2019
- KLA-Tencor Corporation
- Shiow-Hwei Hwang
- G01 - MEASURING TESTING
Information Patent Grant
Optical imaging system with catoptric objective; broadband objectiv...
- Patent number 9,052,494
- Issue date Jun 9, 2015
- KLA-Tencor Technologies Corporation
- Shiow-Hwei Hwang
- G01 - MEASURING TESTING
Information Patent Grant
Optical imaging system with laser droplet plasma illuminator
- Patent number 8,575,576
- Issue date Nov 5, 2013
- KLA-Tencor Corporation
- Richard W. Solarz
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for inspection of a specimen using different in...
- Patent number 8,384,887
- Issue date Feb 26, 2013
- KLA-Tencor Technologies Corp.
- Steve R. Lange
- G01 - MEASURING TESTING
Information Patent Grant
Systems configured to generate output corresponding to defects on a...
- Patent number 8,355,140
- Issue date Jan 15, 2013
- KLA-Tencor Technologies Corp.
- Shiow-Hwei Hwang
- G01 - MEASURING TESTING
Information Patent Grant
Image collection
- Patent number 8,178,860
- Issue date May 15, 2012
- KLA-Tencor Corporation
- Gregory L. Kirk
- G01 - MEASURING TESTING
Information Patent Grant
Systems configured to generate output corresponding to defects on a...
- Patent number 7,924,434
- Issue date Apr 12, 2011
- KLA-Tencor Technologies Corp.
- Shiow-Hwei Hwang
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for inspection of a specimen using different in...
- Patent number 7,738,089
- Issue date Jun 15, 2010
- KLA-Tencor Technologies Corp.
- Steve R. Lange
- G01 - MEASURING TESTING
Information Patent Grant
System and method for coherent optical inspection
- Patent number 7,327,464
- Issue date Feb 5, 2008
- KLA-Tencor Technologies Corporation
- Shiow-Hwei Hwang
- G01 - MEASURING TESTING
Information Patent Grant
System and method for performing bright field and dark field optica...
- Patent number 7,259,869
- Issue date Aug 21, 2007
- KLA-Tencor Technologies Corporation
- Shiow-Hwei Hwang
- G01 - MEASURING TESTING
Information Patent Grant
System and method for coherent optical inspection
- Patent number 7,209,239
- Issue date Apr 24, 2007
- KLA-Tencor Technologies Corporation
- Shiow-Hwei Hwang
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus using microscopic and interferometric based de...
- Patent number 7,095,507
- Issue date Aug 22, 2006
- KLA-Tencor Technologies Corporation
- Shiow-Hwei Hwang
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus using interferometric metrology for high aspec...
- Patent number 7,061,625
- Issue date Jun 13, 2006
- KLA-Tencor Technologies Corporation
- Shiow-Hwei Hwang
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Inspection System Including Parallel Imaging Paths with Multiple an...
- Publication number 20140285657
- Publication date Sep 25, 2014
- KLA-Tencor Corporation
- Shiow-Hwei Hwang
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL IMAGING SYSTEM WITH CATOPTRIC OBJECTIVE; BROADBAND OBJECTIV...
- Publication number 20130155399
- Publication date Jun 20, 2013
- KLA-Tencor Corporation
- Shiow-Hwei Hwang
- G02 - OPTICS
Information Patent Application
OPTICAL IMAGING SYSTEM WITH LASER DROPLET PLASMA ILLUMINATOR
- Publication number 20120205546
- Publication date Aug 16, 2012
- KLA-Tencor Corporation
- Richard W. Solarz
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL IMAGING SYSTEM WITH CATOPTRIC OBJECTIVE; BROADBAND OBJECTIV...
- Publication number 20110242528
- Publication date Oct 6, 2011
- KLA-Tencor Corporation
- Shiow-Hwei Hwang
- G02 - OPTICS
Information Patent Application
Systems Configured to Generate Output Corresponding to Defects on a...
- Publication number 20110181891
- Publication date Jul 28, 2011
- KLA-Tencor Technologies Corporation
- Shiow-Hwei Hwang
- G01 - MEASURING TESTING
Information Patent Application
Image Collection
- Publication number 20110043797
- Publication date Feb 24, 2011
- KLA-Tencor Corporation
- Gregory L. Kirk
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR INSPECTION OF A SPECIMEN USING DIFFERENT IN...
- Publication number 20100238433
- Publication date Sep 23, 2010
- KLA-Tencor Technologies Corporation
- Steve R. Lange
- G01 - MEASURING TESTING
Information Patent Application
System And Method For Coherent Optical Inspection
- Publication number 20070195332
- Publication date Aug 23, 2007
- KLA-Tencor Technologies Corporation
- Shiow-Hwei Hwang
- G01 - MEASURING TESTING
Information Patent Application
Systems Configured to Generate Output Corresponding to Defects on a...
- Publication number 20070030477
- Publication date Feb 8, 2007
- KLA-TENCOR TECHNOLOGIES CORP.
- Shiow-Hwei Hwang
- G01 - MEASURING TESTING
Information Patent Application
System and method for performing bright field and dark field optica...
- Publication number 20060007448
- Publication date Jan 12, 2006
- Shiow-Hwei Hwang
- G01 - MEASURING TESTING
Information Patent Application
Methods and systems for inspection of a specimen using different in...
- Publication number 20050052643
- Publication date Mar 10, 2005
- Steve R. Lange
- G01 - MEASURING TESTING
Information Patent Application
System and method for coherent optical inspection
- Publication number 20040130710
- Publication date Jul 8, 2004
- Shiow-Hwei Hwang
- G01 - MEASURING TESTING

Shiow-Hwei Hwang

Person

Patents Grantslast 30 patents

Inspection system including parallel imaging paths with multiple an...

Optical imaging system with catoptric objective; broadband objectiv...

Optical imaging system with laser droplet plasma illuminator

Methods and systems for inspection of a specimen using different in...

Systems configured to generate output corresponding to defects on a...

Image collection

Systems configured to generate output corresponding to defects on a...

Methods and systems for inspection of a specimen using different in...

System and method for coherent optical inspection

System and method for performing bright field and dark field optica...

System and method for coherent optical inspection

Method and apparatus using microscopic and interferometric based de...

Method and apparatus using interferometric metrology for high aspec...

Patents Applicationslast 30 patents

Inspection System Including Parallel Imaging Paths with Multiple an...

OPTICAL IMAGING SYSTEM WITH CATOPTRIC OBJECTIVE; BROADBAND OBJECTIV...

OPTICAL IMAGING SYSTEM WITH LASER DROPLET PLASMA ILLUMINATOR

OPTICAL IMAGING SYSTEM WITH CATOPTRIC OBJECTIVE; BROADBAND OBJECTIV...

Systems Configured to Generate Output Corresponding to Defects on a...

Image Collection

METHODS AND SYSTEMS FOR INSPECTION OF A SPECIMEN USING DIFFERENT IN...

System And Method For Coherent Optical Inspection

Systems Configured to Generate Output Corresponding to Defects on a...

System and method for performing bright field and dark field optica...

Methods and systems for inspection of a specimen using different in...

System and method for coherent optical inspection