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Mie-ken, JP
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last 30 patents
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Patent Grant
Method for the formation of copper wiring films
Patent number
6,562,219
Issue date
May 13, 2003
Anelva Corporation
Akiko Kobayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Method for the formation of copper wiring films
Publication number
20020134686
Publication date
Sep 26, 2002
Akiko Kobayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...