TREA

Shiro Koyama

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  • Fuchu, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma treatment apparatus having a workpiece-side electrode ground...
    • Patent number 5,665,167
    • Issue date Sep 9, 1997
    • Tokyo Electron Kabushiki Kaisha
    • Yoichi Deguchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Electrostatic chuck
    • Patent number 5,625,526
    • Issue date Apr 29, 1997
    • Tokyo Electron Limited
    • Masahide Watanabe
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 5,474,643
    • Issue date Dec 12, 1995
    • Tokyo Electron Limited
    • Junichi Arami
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma etching apparatus
    • Patent number 5,320,704
    • Issue date Jun 14, 1994
    • Tokyo Electron Limited
    • Keiji Horioka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma apparatus
    • Patent number 5,236,556
    • Issue date Aug 17, 1993
    • Tokyo Electron Limited
    • Takashi Yokota
    • H01 - BASIC ELECTRIC ELEMENTS