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Shiro Kusumoto
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Yokkaichie, JP
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last 30 patents
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Patent Grant
Self-topcoating photoresist for photolithography
Patent number
7,951,524
Issue date
May 31, 2011
International Business Machines Corporation
Robert Allen
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Patents Applications
last 30 patents
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Patent Application
SELF-TOPCOATING PHOTORESIST FOR PHOTOLITHOGRAPHY
Publication number
20080193879
Publication date
Aug 14, 2008
Robert Allen
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...