Shiro Matsuzaki

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Hitachi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for treating the inner surface of vacuum chamber
- Patent number 5,820,320
- Issue date Oct 13, 1998
- Hitachi, Ltd.
- Toshiaki Kobari
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Process and apparatus for treating inner surface treatment of chamb...
- Patent number 5,626,682
- Issue date May 6, 1997
- Hitachi, Ltd.
- Toshiaki Kobari
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR