Shiro Mishima

Person

Yokohama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor device including a metal wiring with a metal cap
- Patent number 8,614,510
- Issue date Dec 24, 2013
- Kabushiki Kaisha Toshiba
- Hideyuki Tomizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing apparatus
- Patent number 7,198,552
- Issue date Apr 3, 2007
- Ebara Corporation
- Toyomi Nishi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and a method of polishing and cleaning and dryi...
- Patent number 6,997,782
- Issue date Feb 14, 2006
- Ebara Corporation
- Toyomi Nishi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and method
- Patent number 6,500,051
- Issue date Dec 31, 2002
- Ebara Corporation
- Toyomi Nishi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing aparatus and method
- Patent number 5,679,059
- Issue date Oct 21, 1997
- Ebara Corporation
- Toyomi Nishi
- B08 - CLEANING
Information Patent Grant
Polishing apparatus
- Patent number 5,679,063
- Issue date Oct 21, 1997
- Ebara Corporation
- Norio Kimura
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for forming a silicon oxide film on a silicon wafer
- Patent number 5,489,336
- Issue date Feb 6, 1996
- Kabushiki Kaisha Toshiba
- Masako Kodera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming a silicon oxide film on a silicon waffer
- Patent number 5,395,645
- Issue date Mar 7, 1995
- Kabushiki Kaisha Toshiba
- Masako Kodera
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
POLISHING PAD AND POLISHING METHOD
- Publication number 20130252516
- Publication date Sep 26, 2013
- Kabushiki Kaisha Toshiba
- Shiro MISHIMA
- B24 - GRINDING POLISHING
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20100237501
- Publication date Sep 23, 2010
- Hideyuki Tomizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Polishing apparatus
- Publication number 20060084369
- Publication date Apr 20, 2006
- Toyomi Nishi
- B08 - CLEANING
Information Patent Application
Polishing apparatus and a method of polishing and cleaning and dryi...
- Publication number 20030040261
- Publication date Feb 27, 2003
- Toyomi Nishi
- F24 - HEATING RANGES VENTILATING

Shiro Mishima

Person

Patents Grantslast 30 patents

Semiconductor device including a metal wiring with a metal cap

Polishing apparatus

Polishing apparatus and a method of polishing and cleaning and dryi...

Polishing apparatus and method

Polishing aparatus and method

Polishing apparatus

Apparatus for forming a silicon oxide film on a silicon wafer

Method for forming a silicon oxide film on a silicon waffer

Patents Applicationslast 30 patents

POLISHING PAD AND POLISHING METHOD

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

Polishing apparatus

Polishing apparatus and a method of polishing and cleaning and dryi...