Shiro Mishima

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Wappingers Falls, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for cleaning workpiece
- Patent number 5,846,335
- Issue date Dec 8, 1998
- Ebara Corporation
- Toshiro Maekawa
- B08 - CLEANING
Information Patent Grant
Method for planarizing a semiconductor body by CMP method and an ap...
- Patent number 5,695,601
- Issue date Dec 9, 1997
- Kabushiki Kaisha Toshiba
- Masako Kodera
- B24 - GRINDING POLISHING