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Patents Grants
last 30 patents
Information
Patent Grant
Ion implanter and ion implantation method
Patent number
10,249,477
Issue date
Apr 2, 2019
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Syuta Ochi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implantation apparatus and ion implantation method
Patent number
10,217,607
Issue date
Feb 26, 2019
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Kazuhisa Ishibashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implantation apparatus
Patent number
9,984,856
Issue date
May 29, 2018
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Shiro Ninomiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implantation apparatus and scanning waveform preparation method
Patent number
9,905,397
Issue date
Feb 27, 2018
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Shiro Ninomiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implantation apparatus and method of controlling ion implantati...
Patent number
9,837,248
Issue date
Dec 5, 2017
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Masahide Ooura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implantation method and ion implantation apparatus
Patent number
9,646,837
Issue date
May 9, 2017
SEN CORPORATION
Shiro Ninomiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implantation apparatus and ion implantation method
Patent number
9,601,314
Issue date
Mar 21, 2017
Sen Corporation
Shiro Ninomiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Antenna cover and plasma generating device using same
Patent number
9,502,759
Issue date
Nov 22, 2016
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Shiro Ninomiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implantation method and ion implantation apparatus
Patent number
9,379,030
Issue date
Jun 28, 2016
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Shiro Ninomiya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ion implantation method and ion implantation apparatus
Patent number
9,305,784
Issue date
Apr 5, 2016
Sen Corporation
Shiro Ninomiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implantation method and ion implantation apparatus
Patent number
9,165,772
Issue date
Oct 20, 2015
Sen Corporation
Shiro Ninomiya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ion implantation method and ion implantation apparatus
Patent number
8,980,654
Issue date
Mar 17, 2015
Sen Corporation
Shiro Ninomiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implantation method and ion implantation apparatus
Patent number
8,772,142
Issue date
Jul 8, 2014
Sen Corporation
Shiro Ninomiya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ion implantation method and ion implantation apparatus
Patent number
8,772,741
Issue date
Jul 8, 2014
Sen Corporation
Shiro Ninomiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implantation apparatus and ion implantation method
Patent number
8,759,801
Issue date
Jun 24, 2014
Sen Corporation
Shiro Ninomiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam irradiation system and ion beam irradiation method
Patent number
8,735,855
Issue date
May 27, 2014
Sen Corporation
Shiro Ninomiya
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ION IMPLANTER AND ION IMPLANTATION METHOD
Publication number
20180286637
Publication date
Oct 4, 2018
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Syuta Ochi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD
Publication number
20180068829
Publication date
Mar 8, 2018
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Kazuhisa Ishibashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION IMPLANTATION APPARATUS AND SCANNING WAVEFORM PREPARATION METHOD
Publication number
20170271128
Publication date
Sep 21, 2017
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Shiro Ninomiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD
Publication number
20170148633
Publication date
May 25, 2017
SEN Corporation
Shiro NINOMIYA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ION IMPLANTATION APPARATUS
Publication number
20170092464
Publication date
Mar 30, 2017
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Shiro Ninomiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION IMPLANTATION APPARATUS AND METHOD OF CONTROLLING ION IMPLANTATI...
Publication number
20150214007
Publication date
Jul 30, 2015
SEN Corporation
Masahide Ooura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ANTENNA COVER AND PLASMA GENERATING DEVICE USING SAME
Publication number
20150162657
Publication date
Jun 11, 2015
SEN Corporation
Shiro Ninomiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS
Publication number
20140235042
Publication date
Aug 21, 2014
SEN Corporation
Shiro NINOMIYA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS
Publication number
20140065737
Publication date
Mar 6, 2014
SEN Corporation
Shiro Ninomiya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS
Publication number
20140017825
Publication date
Jan 16, 2014
Shiro Ninomiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS
Publication number
20130196492
Publication date
Aug 1, 2013
SEN Corporation
Shiro NINOMIYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS
Publication number
20130157390
Publication date
Jun 20, 2013
SEN Corporation
Shiro NINOMIYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD
Publication number
20130092825
Publication date
Apr 18, 2013
SEN Corporation
Shiro NINOMIYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD
Publication number
20120322248
Publication date
Dec 20, 2012
SEN Corporation
Shiro NINOMIYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS
Publication number
20120252194
Publication date
Oct 4, 2012
SEN Corporation
Shiro NINOMIYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS
Publication number
20120244691
Publication date
Sep 27, 2012
SEN Corporation
Shiro NINOMIYA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ION BEAM IRRADIATION SYSTEM AND ION BEAM IRRADIATION METHOD
Publication number
20110297842
Publication date
Dec 8, 2011
SEN Corporation
Shiro NINOMIYA
H01 - BASIC ELECTRIC ELEMENTS