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Shirou Yoshino
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Hiratsuka-shi, JP
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last 30 patents
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Method of heat treatment of silicon wafer doped with boron
Patent number
7,754,585
Issue date
Jul 13, 2010
Sumco Techxiv Corporation
Yuji Sato
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Method of heat treatment of silicon wafer doped with boron
Publication number
20040048456
Publication date
Mar 11, 2004
Yuji Sato
H01 - BASIC ELECTRIC ELEMENTS