Shirrji Kishimura

Follow

Person

Itami-shi, JP

People

Patents Applicationslast 30 patents

Information Patent Application
Polymers, resist compositions and patterning process
- Publication number 20050106499
- Publication date May 19, 2005
- Shin-Etsu Chemical Co., Ltd.
- Yuji Harada
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...