Shirui Yu

Person

  • Shanghai, CN

Patents Grantslast 30 patents

  • Information Patent Grant

    Image processing method and device for CDSEM

    • Patent number 11,573,188
    • Issue date Feb 7, 2023
    • Shanghai Huali Integrated Circuit Corporation
    • Jiaqi Liu
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Hotspot correction method

    • Patent number 10,325,060
    • Issue date Jun 18, 2019
    • Shanghai Huali Microelectronics Corporation
    • Yiqun Tan
    • G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

  • Information Patent Application

    Method for Manufacturing Photomask and Photomask

    • Publication number 20230127786
    • Publication date Apr 27, 2023
    • SHANGHAI HUALI MICROELECTRONICS CORPORATION
    • Juan Liu
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    IMAGE PROCESSING METHOD AND DEVICE FOR CDSEM

    • Publication number 20210325314
    • Publication date Oct 21, 2021
    • Shanghai Huali Integrated Circuit Corporation
    • Jiaqi LIU
    • G01 - MEASURING TESTING
  • Information Patent Application

    HOTSPOT CORRECTION METHOD

    • Publication number 20190102507
    • Publication date Apr 4, 2019
    • SHANGHAI HUALI MICROELECTRONICS CORPORATION
    • Yiqun Tan
    • G06 - COMPUTING CALCULATING COUNTING