Shiyu Zhang

Person

Hayward, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Laser marking focus feedback system having an intensity indication...
- Patent number 10,916,462
- Issue date Feb 9, 2021
- KLA-Tencor Corporation
- Timothy Russin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma source with lamp house correction
- Patent number 10,823,943
- Issue date Nov 3, 2020
- KLA Corporation
- Shiyu Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Wafer defect inspection and review systems
- Patent number 10,656,098
- Issue date May 19, 2020
- KLA-Tencor Corporation
- Shiyu Zhang
- G02 - OPTICS
Information Patent Grant
All reflective wafer defect inspection and review systems and methods
- Patent number 10,309,907
- Issue date Jun 4, 2019
- KLA-Tencor Corporation
- Shiyu Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Oblique illuminator for inspecting manufactured substrates
- Patent number 9,423,357
- Issue date Aug 23, 2016
- KLA-Tencor Corporation
- Shiyu Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Oblique illuminator for inspecting manufactured substrates
- Patent number 8,794,801
- Issue date Aug 5, 2014
- KLA-Tencor Corporation
- Shiyu Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Substrate-alignment using detector of substrate material
- Patent number RE44116
- Issue date Apr 2, 2013
- Ultratech, Inc.
- Emily True
- 356 - Optics: measuring and testing
Information Patent Grant
Processing substrates using direct and recycled radiation
- Patent number 7,947,968
- Issue date May 24, 2011
- Ultratech, Inc.
- David A. Markle
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate-alignment using detector of substrate material
- Patent number 7,751,067
- Issue date Jul 6, 2010
- Ultratech, Inc.
- Emily True
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for truncating an image formed with coherent...
- Patent number 7,253,376
- Issue date Aug 7, 2007
- Ultratech, Inc.
- Shiyu Zhang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Deep ultraviolet unit-magnification projection optical system and p...
- Patent number 7,177,099
- Issue date Feb 13, 2007
- Ultratech, Inc.
- Romeo I. Mercado
- G02 - OPTICS
Information Patent Grant
Deep ultraviolet unit-magnification projection optical system and p...
- Patent number 6,863,403
- Issue date Mar 8, 2005
- Ultratech, Inc.
- Romeo I. Mercado
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Plasma Source with Lamp House Correction
- Publication number 20200041774
- Publication date Feb 6, 2020
- KLA-Tencor Corporation
- Shiyu Zhang
- G02 - OPTICS
Information Patent Application
LASER MARKING FOCUS FEEDBACK SYSTEM
- Publication number 20190122912
- Publication date Apr 25, 2019
- KLA-Tencor Corporation
- Timothy Russin
- G01 - MEASURING TESTING
Information Patent Application
Wafer Defect Inspection and Review Systems
- Publication number 20170219807
- Publication date Aug 3, 2017
- KLA-Tencor Corporation
- Shiyu Zhang
- G02 - OPTICS
Information Patent Application
ALL REFLECTIVE WAFER DEFECT INSPECTION AND REVIEW SYSTEMS AND METHODS
- Publication number 20160258878
- Publication date Sep 8, 2016
- KLA-Tencor Corporation
- Shiyu Zhang
- G01 - MEASURING TESTING
Information Patent Application
OBLIQUE ILLUMINATOR FOR INSPECTING MANUFACTURED SUBSTRATES
- Publication number 20140299779
- Publication date Oct 9, 2014
- KLA-Tencor Corporation
- Shiyu ZHANG
- G01 - MEASURING TESTING
Information Patent Application
OBLIQUE ILLUMINATOR FOR INSPECTING MANUFACTURED SUBSTRATES
- Publication number 20120218545
- Publication date Aug 30, 2012
- KLA-Tencor Corporation
- Shiyu Zhang
- G01 - MEASURING TESTING
Information Patent Application
Methods and apparatus for truncating an image formed with coherent...
- Publication number 20060163223
- Publication date Jul 27, 2006
- Shiyu Zhang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Deep ultraviolet unit-magnification projection optical system and p...
- Publication number 20050146690
- Publication date Jul 7, 2005
- ULTRATECH, INC.
- Romeo I. Mercado
- G02 - OPTICS
Information Patent Application
Deep ultraviolet unit-magnification projection optical system and p...
- Publication number 20040239893
- Publication date Dec 2, 2004
- Romeo I. Mercado
- G02 - OPTICS

Shiyu Zhang

Person

Patents Grantslast 30 patents

Laser marking focus feedback system having an intensity indication...

Plasma source with lamp house correction

Wafer defect inspection and review systems

All reflective wafer defect inspection and review systems and methods

Oblique illuminator for inspecting manufactured substrates

Oblique illuminator for inspecting manufactured substrates

Substrate-alignment using detector of substrate material

Processing substrates using direct and recycled radiation

Substrate-alignment using detector of substrate material

Methods and apparatus for truncating an image formed with coherent...

Deep ultraviolet unit-magnification projection optical system and p...

Deep ultraviolet unit-magnification projection optical system and p...

Patents Applicationslast 30 patents

Plasma Source with Lamp House Correction

LASER MARKING FOCUS FEEDBACK SYSTEM

Wafer Defect Inspection and Review Systems

ALL REFLECTIVE WAFER DEFECT INSPECTION AND REVIEW SYSTEMS AND METHODS

OBLIQUE ILLUMINATOR FOR INSPECTING MANUFACTURED SUBSTRATES

OBLIQUE ILLUMINATOR FOR INSPECTING MANUFACTURED SUBSTRATES

Methods and apparatus for truncating an image formed with coherent...

Deep ultraviolet unit-magnification projection optical system and p...

Deep ultraviolet unit-magnification projection optical system and p...